Instruments and Methods

modular_cvs

Synthesis

  • Integrated, modular CVS / CVD system
    • reactors
      • hot wall (resitance and HF-furnace)
      • cold wall and
      • microwave reactors
    • precursor delivery systems for
      • gases
      • vapors
      • liquids
      • solids
    • in situ process analysis
      • aerosol mass spectrometer (particles and molecular species)
      • laser-induced fluorescence (gas temperature)

Processing

  • Colloids and films
    • Colloidal dispersion
    • Material inkjet printer
    • Electrophoretic deposition
    • UV-laser sintering
  • Bulk materials
    • Uniaxial pressing
    • Sintering under controlled atmospheres and vacuum
    • Spark-plasma sintering
    • Lapping

Characterization